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193 nm Excimer

Excimer Laser System
PhotoMachining
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Excimer Laser System
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UV photons can now be obtained from several other different laser sources, but excimer lasers, despite their drawbacks, still can do things no other lasers can do and, in some cases (a lot of small holes on close centers), they can be economic since they use mask imaging instead of single point drilling. The resonator cavity ...

Specifications
Gas Mixture: KrF
Wavelength: 193 nm, 248 nm, 351 nm
Pulse Energy: -- mJ
Average Power: 60 W
Max Repetition Rate: 200 Hz
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CL 7000 Excimer Laser
OptoSystems
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CL 7000 Excimer Laser
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Excimer Lasers. 

Specifications
Gas Mixture: ArF, XeCl, KrF
Wavelength: 193 nm, 308 nm, 248 nm
Pulse Energy: 250-400 mJ
Average Power: 35 W
Max Repetition Rate: 100 Hz
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CLS 5000 Excimer Laser
OptoSystems
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CLS 5000 Excimer Laser
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Excimer Lasers. 

Specifications
Gas Mixture: ArF, XeCl, KrF
Wavelength: 193 nm, 308 nm, 248 nm
Pulse Energy: 12-25 mJ
Average Power: 6-12.5 W
Max Repetition Rate: 500 Hz
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IPEX-746 ArF Excimer Laser
LightMachinery Inc
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IPEX-746 ArF Excimer Laser
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The largest single cost of operating an excimer laser is laser gas consumption (also known as dynamic gas lifetime*).  With our patented exciPure™  technology,  LightMachinery has achieved a 10X improvement in gas usage over competing lasers.   This technological breakthrough leads to ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 150 mJ
Average Power: 15 W
Max Repetition Rate: 100 Hz
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IPEX-840 ArF Industrial Excimer Laser
LightMachinery Inc
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IPEX-840 ArF Industrial Excimer Laser
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Designed for high duty cycle operation in a manufacturing environment, IPEX Series lasers deliver high power ultraviolet laser machining combined with state-of-the-art performance.  Incorporating LightMachinery’s patented exciPure™  technology, IPEX lasers offer MASSIVE gas lifetimes, superior optical ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 230 mJ
Average Power: 30 W
Max Repetition Rate: 200 Hz
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ATLEX 500 FBG ArF Excimer Laser
ATL Lasertechnik GmbH
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ATLEX 500 FBG ArF Excimer Laser
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Ultra-compact, high efficient excimer laser for Fiber Bragg Grating (FBG) writing 

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 4.0 W
Max Repetition Rate: 500 Hz
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ATLEX 1000 I ArF Excimer Laser
ATL Lasertechnik GmbH
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ATLEX 1000 I ArF Excimer Laser
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A new generation of compact air-cooled, high repetition rate excimer lasers, designed for low- and mid-range duty cycle applications 

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 8 W
Max Repetition Rate: 1000 Hz
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ATLEX 500 I ArF Excimer Laser
ATL Lasertechnik GmbH
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ATLEX 500 I ArF Excimer Laser
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A new generation of compact air-cooled, high repetition rate excimer lasers, designed for low- and mid-range duty cycle applications 

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 4.0 W
Max Repetition Rate: 500 Hz
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ATLEX 300 I ArF Excimer Laser
ATL Lasertechnik GmbH
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ATLEX 300 I ArF Excimer Laser
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A new generation of compact air-cooled, high repetition rate excimer lasers, designed for low- and mid-range duty cycle applications 

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 2.4 W
Max Repetition Rate: 300 Hz
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ATLEX 300 FBG ArF Excimer Laser
ATL Lasertechnik GmbH
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ATLEX 300 FBG ArF Excimer Laser
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Ultra-compact, high efficient excimer laser for Fiber Bragg Grating (FBG) writing 

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 2.4 W
Max Repetition Rate: 300 Hz
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ATLEX S ArF Excimer Laser (500Hz)
ATL Lasertechnik GmbH
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ATLEX S ArF Excimer Laser (500Hz)
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ATLEX-S-Series-Laser is a very compact UV-light source designed for low- and mid-range duty cycle S Applications

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 4 W
Max Repetition Rate: 500 Hz
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ATLEX S ArF Excimer Laser (300Hz)
ATL Lasertechnik GmbH
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ATLEX S ArF Excimer Laser (300Hz)
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ATLEX-S-Series-Laser is a very compact UV-light source designed for low- and mid-range duty cycle S Applications

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 2.4 W
Max Repetition Rate: 300 Hz
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ATLEX LR compact air-cooled, excimer laser
ATL Lasertechnik GmbH
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ATLEX LR compact air-cooled, excimer laser
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A new generation of compact air-cooled, excimer lasers, designed for low duty cycle applications 

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: N/A W
Max Repetition Rate: N/A Hz
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193nm High Repetition Type GIGANEX 600W Type Laser
Gigaphoton Inc.
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193nm High Repetition Type GIGANEX 600W Type Laser
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We are convinced that GIGANEX, newly created by consolidating the technology and know-how acquired by Gigaphoton from manufacturing excimer lasers as semiconductor lithography light sources, and combining that technology and know-how with the technology of its customers, can also generate new innovations in fields other than ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 100 mJ
Average Power: 600 W
Max Repetition Rate: 6000 Hz
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193nm High Output-Low Repetition Type GIGANEX 600W Type Laser
Gigaphoton Inc.
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193nm High Output-Low Repetition Type GIGANEX 600W Type Laser
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We are convinced that GIGANEX, newly created by consolidating the technology and know-how acquired by Gigaphoton from manufacturing excimer lasers as semiconductor lithography light sources, and combining that technology and know-how with the technology of its customers, can also generate new innovations in fields other than ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 1000 mJ
Average Power: 600 W
Max Repetition Rate: 600 Hz
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GT65A ArF Excimer Laser
Gigaphoton Inc.
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GT65A ArF Excimer Laser
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GT65A, the seventh generation of platforms using the injection lock method, is installed with leading-edge technology and achieves further improved productivity (wafer output) for the customer through “exposure performance improvements” due to changeable spectral width (E95) and improved stability, “high availability” due to extended ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 20 mJ
Average Power: 60 W
Max Repetition Rate: 6000 Hz
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GT64A ArF Immersion Excimer Laser
Gigaphoton Inc.
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GT64A ArF Immersion Excimer Laser
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The GT64A offers the industry\'s highest output power of 120W with  high beam performance and stability.  With design emphasis on performance, efficiency, and reduction of environmental impact, the product challenges the limits of total operational cost efficiency.   This is the 6th generation of products to inherit ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 20 mJ
Average Power: 120 W
Max Repetition Rate: 6000 Hz
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GT63A ArF Excimer Laser 90W version
Gigaphoton Inc.
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GT63A ArF Excimer Laser 90W version
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The GT63A, the latest model of the GT series, is a fifth-generation model featuring the same injection-locking platform. The GT63A is mounted with the four “s” series functions designed in response to customers’ needs to create additional value: sMPL (Spectrum Multi-Positioning LNM)*1, the first customer-approved spectrum ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 15 mJ
Average Power: 90 W
Max Repetition Rate: 6000 Hz
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GT63A ArF Excimer Laser 60W version
Gigaphoton Inc.
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GT63A ArF Excimer Laser 60W version
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The GT63A, the latest model of the GT series, is a fifth-generation model featuring the same injection-locking platform. The GT63A is mounted with the four “s” series functions designed in response to customers’ needs to create additional value: sMPL (Spectrum Multi-Positioning LNM)*1, the first customer-approved spectrum control ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 60 W
Max Repetition Rate: 6000 Hz
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GT62A 6-kHz Excimer Laser 60W version
Gigaphoton Inc.
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GT62A 6-kHz Excimer Laser 60W version
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The GT62A, the latest model of the GT series, is the fourth-generation model featuring the same injection-locking platform; it delivers the world’s highest output, 90 watts, to support double-patterning immersion lithography*. In order to meet a variety of customer needs, a 60-W version of the GT62A also is available to ensure ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 60 W
Max Repetition Rate: 6000 Hz
Data Sheet
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On FindLight marketplace you will find 38 different 193 nm Excimer from suppliers around the world. With just a few clicks you can compare different 193 nm Excimer and get accurate price quotes based on your needs and quantity required. Note that some wholesale suppliers may offer discounts for large quantities. From any product page you can directly contact any vendor within seconds.