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Page 2 - 193 nm Excimer

GT62A 6-kHz Excimer Laser 90W version
Gigaphoton Inc.
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GT62A 6-kHz Excimer Laser 90W version
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The GT62A, the latest model of the GT series, is the fourth-generation model featuring the same injection-locking platform; it delivers the world’s highest output, 90 watts, to support double-patterning immersion lithography*. In order to meet a variety of customer needs, a 60-W version of the GT62A also is available to ensure ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 15 mJ
Average Power: 90 W
Max Repetition Rate: 6000 Hz
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GT61A 6 kHz Excimer Laser
Gigaphoton Inc.
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GT61A 6 kHz Excimer Laser
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Less than a year after we began mass-production and shipment of the GT60A, Gigaphoton has successfully developed the GT61A. Model GT61A offers a 30% improvement of spectral bandwidth (E95%) from that of the GT60A as well as a longer laser chamber life to reduce both downtime and maintenance cost. The GT61A, the third-generation model ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 60 W
Max Repetition Rate: 6000 Hz
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GT60A 6 kHz Excimer Laser
Gigaphoton Inc.
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GT60A 6 kHz Excimer Laser
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Marking less than one year since the company began mass-production and shipment of the GT40A, Gigaphoton has now successfully developed the GT60A, delivering an improved repetition rate 1.5-times that of the GT40A. The GT60A is the latest-generation model, featuring the same injection-locking platform as that used by the GT40A, which ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 60 W
Max Repetition Rate: 6000 Hz
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GT40A 4-kHz ArF Excimer Laser
Gigaphoton Inc.
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GT40A 4-kHz ArF Excimer Laser
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Model GT40A uses an injection-locking resonator (first in the world) as a lithography tool light source to allow simultaneous maintenance of narrower spectral bandwidth and higher output, a combination that is difficult to achieve with conventional technologies. In addition, it provides lower peak-pulse energy that reduces damage to ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 11.25 mJ
Average Power: 45 W
Max Repetition Rate: 4000 Hz
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G42A 4-kHz ArF Excimer Laser
Gigaphoton Inc.
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G42A 4-kHz ArF Excimer Laser
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4-kHz ArF Excimer Laser for 80-nm Technology Node

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 5 mJ
Average Power: 20 W
Max Repetition Rate: 4000 Hz
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G41A 4-kHz ArF Excimer Laser
Gigaphoton Inc.
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G41A 4-kHz ArF Excimer Laser
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4-kHz ArF Excimer Laser for Design Rules of up to 0.10 µm

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 5 mJ
Average Power: 20 W
Max Repetition Rate: 4000 Hz
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COMPACT EXCIMER LASER CEX-100 ArF
LDI Innovation
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COMPACT EXCIMER LASER CEX-100 ArF
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CEX-100 is the most compact excimer laser in its power class. It is designed as an air cooled single unit with integrated power supply, AC input line voltage, long life thyratron, single gas optics and halogen compatible construction.

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 4.0 mJ
Average Power: 0.35 W
Max Repetition Rate: N/A Hz
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CLS5000 Series Excimer Laser
Optromix, Inc.
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CLS5000 Series Excimer Laser
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CLS5000 is a compact 193 nm compact excimer laser. It is also available in different configurations with 248 nm and 308 nm wavelengths. It has an outstanding beam stability performance because of its extra features in positioning and pointing, which makes CLS5000 a great solution for a ...

Specifications
Gas Mixture: ArF, KrF, XeCl
Wavelength: 193 nm, 248 nm, 308 nm
Pulse Energy: 15 mJ
Average Power: 7.5 W
Max Repetition Rate: 500 Hz
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CL-7520 Excimer Laser
Optromix, Inc.
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CL-7520 Excimer Laser
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Optromix CL7500 is a narrow linewidth excimer laser with 193 nm and 248 nm wavelengths options. Our excimer laser has a special MOPAdesign, which means that its configuration includes master oscillator and power amplifier. Moreover, one of the key features of this laser istunable wavelength, which enables ...

Specifications
Gas Mixture: ArF, KrF
Wavelength: 193 nm, 248 nm
Pulse Energy: 100 mJ
Average Power: 2 W
Max Repetition Rate: 20 Hz
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CL-7550 Excimer Laser
Optromix, Inc.
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CL-7550 Excimer Laser
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Optromix CL7500 is a narrow linewidth excimer laser with 193 nm and 248 nm wavelengths options. Our excimer laser has a special MOPA design, which means that its configuration includes master oscillator and power amplifier. Moreover, one of the key features of this laser is tunable wavelength, ...

Specifications
Gas Mixture: ArF, KrF
Wavelength: 193 nm, 248 nm
Pulse Energy: 100 mJ
Average Power: 5 W
Max Repetition Rate: 50 Hz
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CL7000 PLD Series Excimer Laser
Optromix, Inc.
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CL7000 PLD Series Excimer Laser
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Optromix CL 7000PLD is an excimer laser with 193 nm or 248 nm wavelengths. It has high pulse energy, up to 1 J, for material processing,medical and life science. It has stabilized energy output, which is achieved through energy stabilization system of the excimer laser. On top of that, CL 7000PLD has an ...

Specifications
Gas Mixture: ArF, KrF
Wavelength: 193 nm, 248 nm
Pulse Energy: 500 mJ
Average Power: 8 W
Max Repetition Rate: 20 Hz
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CL-7000K Excimer Laser
Optromix, Inc.
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CL-7000K Excimer Laser
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Optromix CL7000k is excimer laser with 193 nm, 248 nm or 308 nm wavelengths and max repetition rate of 1000 Hz. It has a high beampointing stability, and on top of that Optromix can deliver the laser system in two different configurations, with a beam size of 16 mm x 5 mm or 6 mm x 5 mm, depending on the ...

Specifications
Gas Mixture: ArF, KrF, XeCl
Wavelength: 193 nm, 248 nm, 308 nm
Pulse Energy: 24 mJ
Average Power: 20 W
Max Repetition Rate: 1000 Hz
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CL-7020 Excimer Laser
Optromix, Inc.
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CL-7020 Excimer Laser
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Optromix InfraLight 7000 excimer laser 193, 248, 308 nm has a high pulse energy, which allows successful performance of various applications. Its high tech metal ceramic design makes the laser unique and easy to utilize. Excimer laser is equipped with a long lifetime thyratron switch to manipulate voltage discharges. Builtin energy ...

Specifications
Gas Mixture: ArF, KrF, XeCl
Wavelength: 193 nm, 248 nm, 308 nm
Pulse Energy: 300 mJ
Average Power: 6 W
Max Repetition Rate: 20 Hz
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CL-7050 Excimer Laser
Optromix, Inc.
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CL-7050 Excimer Laser
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Optromix InfraLight 7000 excimer laser 193, 248, 308 nm has a high pulse energy, which allows successful performance of various applications. Its high tech metal ceramic design makes the laser unique and easy to utilize. Excimer laser is equipped with a long lifetime thyratron switch to manipulate voltage discharges. Builtin energy ...

Specifications
Gas Mixture: ArF, KrF, XeCl
Wavelength: 193 nm, 248 nm, 308 nm
Pulse Energy: 400 mJ
Average Power: 20 W
Max Repetition Rate: 50 Hz
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CL-7100 Excimer Laser
Optromix, Inc.
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CL-7100 Excimer Laser
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Optromix InfraLight 7000 excimer laser 193, 248, 308 nm has a high pulse energy, which allows successful performance of various applications. Its high tech metal ceramic design makes the laser unique and easy to utilize. Excimer laser is equipped with a long lifetime thyratron switch to manipulate ...

Specifications
Gas Mixture: ArF, KrF, XeCl
Wavelength: 193 nm, 248 nm, 308 nm
Pulse Energy: 250 mJ
Average Power: 25 W
Max Repetition Rate: 100 Hz
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CL 5300 Excimer Laser
Optromix, Inc.
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CL 5300 Excimer Laser
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Optromix CL5000 is a compact and powerful excimer laser with wavelengths 193 nm, 248 nm and 308 nm. CL5000 is equipped with high voltage switch – a high resource cold cathode thyratron. The laser has an average power stabilization system and a computer control, which makes it easy and ...

Specifications
Gas Mixture: ArF, KrF, XeCl
Wavelength: 193 nm, 248 nm, 308 nm
Pulse Energy: 25 mJ
Average Power: 7 W
Max Repetition Rate: 300 Hz
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CL 5200 Excimer Laser
Optromix, Inc.
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CL 5200 Excimer Laser
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Optromix CL5000 is a compact and powerful excimer laser with wavelengths 193 nm, 248 nm and 308 nm. CL5000 is equipped with high voltage switch – a high resource cold cathode thyratron. The laser has an average power stabilization system and a computer control, which makes it easy and ...

Specifications
Gas Mixture: ArF, KrF, XeCl
Wavelength: 193 nm, 248 nm, 308 nm
Pulse Energy: 40 mJ
Average Power: 8 W
Max Repetition Rate: 200 Hz
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CL-5100 Excimer Laser
Optromix, Inc.
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CL-5100 Excimer Laser
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Optromix CL5000 is a compact and powerful excimer laser with wavelengths 193 nm, 248 nm and 308 nm. CL5000 is equipped with highvoltage switch – a high resource cold cathode thyratron. The laser has an average power stabilization system and a computer control, which makes it easy and convenient to ...

Specifications
Gas Mixture: ArF, KrF, XeCl
Wavelength: 193 nm, 248 nm, 308 nm
Pulse Energy: 20 mJ
Average Power: 2 W
Max Repetition Rate: 100 Hz
Data Sheet
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