193nm High Repetition Type GIGANEX 600W Type Laser
Description
We are convinced that GIGANEX, newly created by consolidating the technology and know-how acquired by Gigaphoton from manufacturing excimer lasers as semiconductor lithography light sources, and combining that technology and know-how with the technology of its customers, can also generate new innovations in fields other than semiconductor lithography as a high performance DUV light source.
Because the GIGANEX Series was designed on Gigaphoton’s GT platform and devised for maximum universality, it can be expected to be highly reliable. Also, it has inherited the high output and high oscillating frequency that are the characteristics of the GT Series and can be expected to realize designs that are even more suitable for laser annealing.
193nm High Repetition Type GIGANEX 600W Type Laser
Specifications |
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|---|---|
| Gas Mixture: | ArF |
| Wavelength: | 193 nm |
| Pulse Energy: | 100 mJ |
| Average Power: | 600 W |
| Max Repetition Rate: | 6000 Hz |
| Pulse Duration: | 70 ns |
Applications
Expected Fields of Application: FPD manufacturing processes, and flexible device manufacturing processes, Semiconductor manufacturing processes
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Japan
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Frequently Asked Questions
Yes, the GIGANEX laser is highly reliable due to its design on Gigaphoton's GT platform and its high output and high oscillating frequency inherited from the GT Series.
The GIGANEX laser was designed for use as a high performance DUV light source in fields such as FPD manufacturing processes, flexible device manufacturing processes, and semiconductor manufacturing processes.
The GIGANEX laser has a maximum power output of 600W.
The GIGANEX laser has a wavelength of 193nm.
The GIGANEX laser was created by consolidating the technology and know-how acquired by Gigaphoton from manufacturing excimer lasers as semiconductor lithography light sources, and combining that technology and know-how with the technology of its customers.