G10K 1-kHz KrF Excimer Laser
Description
Stability and durability are the biggest technological challenges for an excimer laser, because it uses fluorine, high-voltage discharge, and deep UV, all of which are highly reactive. As well as stability and durability, an excimer laser light source for lithography tools requires high monochromaticity for the laser beam and high uniformity for the output energy.
As the world’s first excimer laser light source that satisfies all of these requirements, the G10K has earned a top reputation in the lithography light source market since it was marketed in 1997. This model is still operating in the field world wide.
G10K 1-kHz KrF Excimer Laser
Specifications |
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|---|---|
| Gas Mixture: | KrF |
| Wavelength: | 248 nm |
| Pulse Energy: | 10 mJ |
| Average Power: | 10 W |
| Max Repetition Rate: | 1000 Hz |
| Pulse Duration: | N/A ns |
Features
- Stable emission and high durability for achieving high uptime and low cost of ownership
- Gigaphoton
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How to order?
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Ships from:
Japan
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Frequently Asked Questions
Yes, the G10K is still operating in the field worldwide.
The challenges of an excimer laser are stability and durability, as it uses fluorine, high-voltage discharge, and deep UV, all of which are highly reactive.
The G10K features stable emission and high durability for achieving high uptime and low cost of ownership.
The G10K 1-kHz KrF Excimer Laser is an excimer laser light source that satisfies stability, durability, high monochromaticity, and high uniformity requirements.
The G10K has earned a top reputation in the lithography light source market since it was marketed in 1997.