G20K 2 kHz KrF Excimer Laser
Description
The G20K features high energy stability (±0.4%) and a narrow spectral bandwidth (FWHM) of 0.6 pm or less to allow exposure of 0.18-µm geometries at high resolution.
G20K 2 kHz KrF Excimer Laser
Specifications |
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|---|---|
| Gas Mixture: | KrF |
| Wavelength: | 248 nm |
| Pulse Energy: | 10 mJ |
| Average Power: | 20 W |
| Max Repetition Rate: | 2000 Hz |
| Pulse Duration: | N/A ns |
Features
- Repetition rate increased from 1000 Hz (G10K) to 2000 Hz to achieve higher throughput.
- Great enhancement of laser emission stability and module durability allows further reduction of the CoO (running cost per pulse).
- Compact size that reduces the floor footprint by 14% compared with the G10K.
- A newly designed solid-state pulse power supply allows a 20% reduction of power consumption.
For pricing, technical or any other questions please contact the supplier
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How to order?
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Ships from:
Japan
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Sold by:
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Frequently Asked Questions
The G20K laser has a great enhancement of laser emission stability and module durability, which allows for further reduction of the CoO (running cost per pulse).
The G20K laser features high energy stability of ±0.4%.
The repetition rate of the G20K laser has been increased from 1000 Hz (G10K) to 2000 Hz to achieve higher throughput.
The G20K laser has a compact size that reduces the floor footprint by 14% compared with the G10K.
The G20K laser has a narrow spectral bandwidth (FWHM) of 0.6 pm or less.