G42A 4-kHz ArF Excimer Laser
Description
4-kHz ArF Excimer Laser for 80-nm Technology Node
G42A 4-kHz ArF Excimer Laser
Specifications |
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|---|---|
| Gas Mixture: | ArF |
| Wavelength: | 193 nm |
| Pulse Energy: | 5 mJ |
| Average Power: | 20 W |
| Max Repetition Rate: | 4000 Hz |
| Pulse Duration: | N/A ns |
Features
- Spectral bandwidth (FWHM) improved from 0.35 pm (G41A) to 0.3 pm to allow exposure of 80-nm geometries based on the G41A
- Use of highly durable parts for each module to prolong the optical module life and further reduce CoO
- Laser chamber: Use of highly durable parts for the electrodes
- Line-narrowing module, monitor module, etc.: Use of highly durable materials for the optics
For pricing, technical or any other questions please contact the supplier
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- No markups, no fees
- Direct contact with supplier
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How to order?
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Ships from:
Japan
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On FindLight:
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Frequently Asked Questions
The G42A offers improved spectral bandwidth, highly durable parts for prolonged optical module life, and reduced CoO.
The CoO (cost of ownership) is further reduced due to the use of highly durable parts for each module, prolonging the optical module life.
The G42A 4-kHz ArF Excimer Laser is a laser instrument designed for the 80-nm technology node.
The spectral bandwidth of the G42A has been improved from 0.35 pm (G41A) to 0.3 pm to allow exposure of 80-nm geometries based on the G41A.
Highly durable parts are used for each module, including the laser chamber, electrodes, line-narrowing module, monitor module, and optics.