GT61A 6 kHz Excimer Laser
Description
Less than a year after we began mass-production and shipment of the GT60A, Gigaphoton has successfully developed the GT61A. Model GT61A offers a 30% improvement of spectral bandwidth (E95%) from that of the GT60A as well as a longer laser chamber life to reduce both downtime and maintenance cost. The GT61A, the third-generation model of the GT series, features the same injection-locking platform as that used by models GT40A and GT60A, which already have been accepted by major users in the global semiconductor industry. The design concept and reliability of the GT series are highly acclaimed in the industry. Because it is based on the same platform, the GT61A maximizes standardization and enables the use of common components, thereby ensuring that users can achieve high reliability right from the outset.
GT61A 6 kHz Excimer Laser
Specifications |
|
|---|---|
| Gas Mixture: | ArF |
| Wavelength: | 193 nm |
| Pulse Energy: | 10 mJ |
| Average Power: | 60 W |
| Max Repetition Rate: | 6000 Hz |
| Pulse Duration: | N/A ns |
Features
- Improved Spectrum Performance: Improving on the GT60A, which achieved a spectral bandwidth (E95%) of 0.5 pm, the GT61A reaches a spectral bandwidth of 0.35 pm. In addition, a newly developed high-precision measuring instrument and stabilization mechanism are provided as a standard feature, allowing highly stable spectrum performance throughout the entire life time. The GT61A represents a great contribution to the stability of the lithography process.
- High Reliability and High Stability: With its lengthened laser chamber life, the GT61A enabled a reduction of down time for maintenance as well as reduced maintenance cost. A major advantage of the GT series is the ease of module replacement and serviceability, ensuring the high reliability and high uptime essential in today’s semiconductor fabs. The GT61A leverages the same platform as that of the GT40A/GT60A, thereby maximizing standardization as well as enabling the use of common components to ensure high reliability even from the beginning of its introduction.
For pricing, technical or any other questions please contact the supplier
- No registration required
- No markups, no fees
- Direct contact with supplier
Contact Supplier
How to order?
-
Ships from:
Japan
-
Sold by:
-
On FindLight:
External Vendor
Claim Gigaphoton Inc. Page to edit and add data
Frequently Asked Questions
The GT61A offers highly stable spectrum performance throughout its entire lifetime, thanks to a newly developed high-precision measuring instrument and stabilization mechanism.
The GT series offers high reliability and high stability, with ease of module replacement and serviceability. The GT61A leverages the same platform as the GT40A and GT60A, maximizing standardization and enabling the use of common components to ensure high reliability from the beginning.
The GT61A offers a 30% improvement in spectral bandwidth (E95%) and a longer laser chamber life compared to the GT60A.
The GT61A features the same injection-locking platform as the GT40A and GT60A, which have already been accepted by major users in the global semiconductor industry.
The GT61A has a spectral bandwidth (E95%) of 0.35 pm, which is an improvement from the GT60A's 0.5 pm.