GT63A ArF Excimer Laser 60W version
Description
The GT63A, the latest model of the GT series, is a fifth-generation model featuring the same injection-locking platform. The GT63A is mounted with the four “s” series functions designed in response to customers’ needs to create additional value: sMPL (Spectrum Multi-Positioning LNM)*1, the first customer-approved spectrum control (“focus drilling”) technology to achieve a wider depth of focus; sGRYCOS (Sixty Gigaphoton Recycled Chamber Operation System), a unique chamber technology that lowers operating costs; sTGM (Supreme Total Gas Manager), a gas management system that achieves higher uptime while using less process gas; and sMONITORING (Smart Monitoring), real-time information management tracking of the highest laser stability in the market.
The GT series has been widely accepted by our major customers; it is renowned worldwide for its design concept and high reliability. The GT63A is designed on the same platform as the previous GT series models so as to use as many common components as possible, thus ensuring high reliability immediately after introduction to customers’ sites.
GT63A ArF Excimer Laser 60W version
Specifications |
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|---|---|
| Gas Mixture: | ArF |
| Wavelength: | 193 nm |
| Pulse Energy: | 10 mJ |
| Average Power: | 60 W |
| Max Repetition Rate: | 6000 Hz |
| Pulse Duration: | N/A ns |
Features
- sMPL: The sMPL technology for focus drilling increases laser spectrum control width to a level 10 times that of conventional technology, thus creating a greater depth of focus. Focus drilling enables expansion of the lithography process window for contact holes, trenches and vias that is not possible with conventional technology, while avoiding negative effects on critical dimension uniformity (CDU), overlay and productivity. The sMPL technology was tested in a high-volume manufacturing environment in partnership with a leading scanner manufacturer and device manufacturer.
- sGRYCOS: The enhanced sGRYCOS technology extends the effective life of a laser chamber — one of the main consumable components of an excimer laser — to 1.5 times longer than any conventional chamber today, offering world-class endurance that significantly reduces factory operating costs. This durability results from increasing the strength of the pre-ionization in a newly developed chamber and uses a robust pulse-power supply for today’s and tomorrow’s power requirements.
- sTGM: The sTGM technology implements an innovative wavelength calibration method to eliminate the previous need to routinely replace the laser chamber’s gas. This new industry standard completely eliminates wasted process gases based on calibration requirements, thereby measurably reducing facility costs and improving laser availability on an annual basis. This unique gas management technology allows for system calibration of laser wavelength “as-is” without replacement of the laser chamber’s gas, a first-of-its-kind capability.
- sMONITORING: The sMONITORING technology, an extension of existing real-time monitoring of laser performance, can be connected with the end-user’s FDC (Fault Detection and Classification) system to monitor system operation. It is a final check on highly stable laser output to the scanner and on-wafer performance.
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Frequently Asked Questions
The four "s" series functions of the GT63A are sMPL (Spectrum Multi-Positioning LNM)*1, sGRYCOS (Sixty Gigaphoton Recycled Chamber Operation System), sTGM (Supreme Total Gas Manager), and sMONITORING (Smart Monitoring).
The GT63A is a fifth-generation laser model that features an injection-locking platform and is mounted with four "s" series functions designed in response to customers' needs to create additional value.
The sGRYCOS technology of the GT63A is a unique chamber technology that lowers operating costs by extending the effective life of a laser chamber to 1.5 times longer than any conventional chamber today.
The sMPL technology of the GT63A is a focus drilling technology that increases laser spectrum control width to a level 10 times that of conventional technology, thus creating a greater depth of focus.
The sTGM technology of the GT63A is a gas management system that achieves higher uptime while using less process gas by implementing an innovative wavelength calibration method to eliminate the previous need to routinely replace the laser chamber's gas.