GT65A ArF Excimer Laser
Description
GT65A, the seventh generation of platforms using the injection lock method, is installed with leading-edge technology and achieves further improved productivity (wafer output) for the customer through “exposure performance improvements” due to changeable spectral width (E95) and improved stability, “high availability” due to extended module lifespan and “reduced environmental load” as it is helium free.
GT65A ArF Excimer Laser
Specifications |
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|---|---|
| Gas Mixture: | ArF |
| Wavelength: | 193 nm |
| Pulse Energy: | 20 mJ |
| Average Power: | 60 W |
| Max Repetition Rate: | 6000 Hz |
| Pulse Duration: | N/A ns |
Features
- Changeable spectral width (E95): The spectral width can be modified in order to suit various customer requirements and uses. For example, the spectral width can compensate for contrast performance variations in different generations of exposure devices. Also, it is possible to match OPC characteristics between equipment or between masks due to the changeable spectral width functionality (1)
(1) This functionality varies according to the connected exposure device.
- Improved spectral width (E95) stability: The spectral width control speed has been successfully increased to 20 times that of previous equipment. This ensures that the spectral width is more stable during equipment operation and allows for a reduction in critical dimension errors.
- Extended module lifespan: By extending the main module lifespan, the maintenance frequency has been decreased even further. This makes it possible to operate the equipment for extended periods of time.
- Helium free: Technology that uses zero helium for ArF excimer laser operation is installed. This contributes to a reduction in customer costs and a reduced environmental load.
For pricing, technical or any other questions please contact the supplier
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Ships from:
Japan
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Frequently Asked Questions
The GT65A ArF Excimer Laser has changeable spectral width (E95), improved spectral width (E95) stability, extended module lifespan, and is helium-free.
Changeable spectral width (E95) is a functionality that allows the spectral width to be modified to suit various customer requirements and uses.
The extended module lifespan reduces the maintenance frequency, making it possible to operate the equipment for extended periods of time.
The helium-free technology contributes to a reduction in customer costs and a reduced environmental load.
The GT65A ArF Excimer Laser is a seventh-generation platform that uses the injection lock method and is installed with leading-edge technology.