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Page 3 - Excimer

GT64A ArF Immersion Excimer Laser
Gigaphoton Inc.
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GT64A ArF Immersion Excimer Laser
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The GT64A offers the industry\'s highest output power of 120W with  high beam performance and stability.  With design emphasis on performance, efficiency, and reduction of environmental impact, the product challenges the limits of total operational cost efficiency.   This is the 6th generation of products to inherit ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 20 mJ
Average Power: 120 W
Max Repetition Rate: 6000 Hz
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GT63A ArF Excimer Laser 90W version
Gigaphoton Inc.
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GT63A ArF Excimer Laser 90W version
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The GT63A, the latest model of the GT series, is a fifth-generation model featuring the same injection-locking platform. The GT63A is mounted with the four “s” series functions designed in response to customers’ needs to create additional value: sMPL (Spectrum Multi-Positioning LNM)*1, the first customer-approved spectrum ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 15 mJ
Average Power: 90 W
Max Repetition Rate: 6000 Hz
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GT63A ArF Excimer Laser 60W version
Gigaphoton Inc.
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GT63A ArF Excimer Laser 60W version
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The GT63A, the latest model of the GT series, is a fifth-generation model featuring the same injection-locking platform. The GT63A is mounted with the four “s” series functions designed in response to customers’ needs to create additional value: sMPL (Spectrum Multi-Positioning LNM)*1, the first customer-approved spectrum control ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 60 W
Max Repetition Rate: 6000 Hz
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GT62A 6-kHz Excimer Laser 60W version
Gigaphoton Inc.
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GT62A 6-kHz Excimer Laser 60W version
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The GT62A, the latest model of the GT series, is the fourth-generation model featuring the same injection-locking platform; it delivers the world’s highest output, 90 watts, to support double-patterning immersion lithography*. In order to meet a variety of customer needs, a 60-W version of the GT62A also is available to ensure ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 60 W
Max Repetition Rate: 6000 Hz
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GT62A 6-kHz Excimer Laser 90W version
Gigaphoton Inc.
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GT62A 6-kHz Excimer Laser 90W version
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The GT62A, the latest model of the GT series, is the fourth-generation model featuring the same injection-locking platform; it delivers the world’s highest output, 90 watts, to support double-patterning immersion lithography*. In order to meet a variety of customer needs, a 60-W version of the GT62A also is available to ensure ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 15 mJ
Average Power: 90 W
Max Repetition Rate: 6000 Hz
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GT61A 6 kHz Excimer Laser
Gigaphoton Inc.
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GT61A 6 kHz Excimer Laser
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Less than a year after we began mass-production and shipment of the GT60A, Gigaphoton has successfully developed the GT61A. Model GT61A offers a 30% improvement of spectral bandwidth (E95%) from that of the GT60A as well as a longer laser chamber life to reduce both downtime and maintenance cost. The GT61A, the third-generation model ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 60 W
Max Repetition Rate: 6000 Hz
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GT60A 6 kHz Excimer Laser
Gigaphoton Inc.
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GT60A 6 kHz Excimer Laser
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Marking less than one year since the company began mass-production and shipment of the GT40A, Gigaphoton has now successfully developed the GT60A, delivering an improved repetition rate 1.5-times that of the GT40A. The GT60A is the latest-generation model, featuring the same injection-locking platform as that used by the GT40A, which ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 10 mJ
Average Power: 60 W
Max Repetition Rate: 6000 Hz
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GT40A 4-kHz ArF Excimer Laser
Gigaphoton Inc.
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GT40A 4-kHz ArF Excimer Laser
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Model GT40A uses an injection-locking resonator (first in the world) as a lithography tool light source to allow simultaneous maintenance of narrower spectral bandwidth and higher output, a combination that is difficult to achieve with conventional technologies. In addition, it provides lower peak-pulse energy that reduces damage to ...

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 11.25 mJ
Average Power: 45 W
Max Repetition Rate: 4000 Hz
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G42A 4-kHz ArF Excimer Laser
Gigaphoton Inc.
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G42A 4-kHz ArF Excimer Laser
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4-kHz ArF Excimer Laser for 80-nm Technology Node

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 5 mJ
Average Power: 20 W
Max Repetition Rate: 4000 Hz
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G41A 4-kHz ArF Excimer Laser
Gigaphoton Inc.
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G41A 4-kHz ArF Excimer Laser
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4-kHz ArF Excimer Laser for Design Rules of up to 0.10 µm

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 5 mJ
Average Power: 20 W
Max Repetition Rate: 4000 Hz
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G41K-1H KrF 4 kHz Excimer Laser
Gigaphoton Inc.
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G41K-1H KrF 4 kHz Excimer Laser
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As the upgrade version of the second-generation model of 4-kHz excimer laser G41K, G41K-1H is mounted with a magnetic-levitation laser chamber and highly efficient line-narrowing and monitor modules on the G41K platform as standard features to achieve a high output of 40 W, one class higher than any other product. The G41K-1H has ...

Specifications
Gas Mixture: KrF
Wavelength: 248 nm
Pulse Energy: 10 mJ
Average Power: 40 W
Max Repetition Rate: 4000 Hz
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G21K 2 kHz KrF Excimer Laser
Gigaphoton Inc.
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G21K 2 kHz KrF Excimer Laser
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2 kHz KrF Excimer Laser for 0.13 µm Design Rule

Specifications
Gas Mixture: KrF
Wavelength: 248 nm
Pulse Energy: 10 mJ
Average Power: 20 W
Max Repetition Rate: 2000 Hz
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G20K 2 kHz KrF Excimer Laser
Gigaphoton Inc.
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G20K 2 kHz KrF Excimer Laser
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The G20K features high energy stability (±0.4%) and a narrow spectral bandwidth (FWHM) of 0.6 pm or less to allow exposure of 0.18-µm geometries at high resolution.

Specifications
Gas Mixture: KrF
Wavelength: 248 nm
Pulse Energy: 10 mJ
Average Power: 20 W
Max Repetition Rate: 2000 Hz
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G10K 1-kHz KrF Excimer Laser
Gigaphoton Inc.
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G10K 1-kHz KrF Excimer Laser
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Stability and durability are the biggest technological challenges for an excimer laser, because it uses fluorine, high-voltage discharge, and deep UV, all of which are highly reactive. As well as stability and durability, an excimer laser light source for lithography tools requires high monochromaticity for the laser beam and high ...

Specifications
Gas Mixture: KrF
Wavelength: 248 nm
Pulse Energy: 10 mJ
Average Power: 10 W
Max Repetition Rate: 1000 Hz
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COMPACT EXCIMER LASER CEX-100 XeCl
LDI Innovation
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COMPACT EXCIMER LASER CEX-100 XeCl
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CEX-100 is the most compact excimer laser in its power class. It is designed as an air cooled single unit with integrated power supply, AC input line voltage, long life thyratron, single gas optics and halogen compatible construction.

Specifications
Gas Mixture: XeCl
Wavelength: 308 nm
Pulse Energy: 2.0 mJ
Average Power: 0.2 W
Max Repetition Rate: N/A Hz
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COMPACT EXCIMER LASER CEX-100 KrF
LDI Innovation
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COMPACT EXCIMER LASER CEX-100 KrF
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CEX-100 is the most compact excimer laser in its power class. It is designed as an air cooled single unit with integrated power supply, AC input line voltage, long life thyratron, single gas optics and halogen compatible construction.

Specifications
Gas Mixture: KrF
Wavelength: 248 nm
Pulse Energy: 5.0 mJ
Average Power: 0.5 W
Max Repetition Rate: N/A Hz
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COMPACT EXCIMER LASER CEX-100 ArF
LDI Innovation
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COMPACT EXCIMER LASER CEX-100 ArF
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CEX-100 is the most compact excimer laser in its power class. It is designed as an air cooled single unit with integrated power supply, AC input line voltage, long life thyratron, single gas optics and halogen compatible construction.

Specifications
Gas Mixture: ArF
Wavelength: 193 nm
Pulse Energy: 4.0 mJ
Average Power: 0.35 W
Max Repetition Rate: N/A Hz
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CLS5000 Series Excimer Laser
Optromix, Inc.
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CLS5000 Series Excimer Laser
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CLS5000 is a compact 193 nm compact excimer laser. It is also available in different configurations with 248 nm and 308 nm wavelengths. It has an outstanding beam stability performance because of its extra features in positioning and pointing, which makes CLS5000 a great solution for a ...

Specifications
Gas Mixture: ArF, KrF, XeCl
Wavelength: 193 nm, 248 nm, 308 nm
Pulse Energy: 15 mJ
Average Power: 7.5 W
Max Repetition Rate: 500 Hz
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CL-7520 Excimer Laser
Optromix, Inc.
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CL-7520 Excimer Laser
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Optromix CL7500 is a narrow linewidth excimer laser with 193 nm and 248 nm wavelengths options. Our excimer laser has a special MOPAdesign, which means that its configuration includes master oscillator and power amplifier. Moreover, one of the key features of this laser istunable wavelength, which enables ...

Specifications
Gas Mixture: ArF, KrF
Wavelength: 193 nm, 248 nm
Pulse Energy: 100 mJ
Average Power: 2 W
Max Repetition Rate: 20 Hz
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CL-7550 Excimer Laser
Optromix, Inc.
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CL-7550 Excimer Laser
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Optromix CL7500 is a narrow linewidth excimer laser with 193 nm and 248 nm wavelengths options. Our excimer laser has a special MOPA design, which means that its configuration includes master oscillator and power amplifier. Moreover, one of the key features of this laser is tunable wavelength, ...

Specifications
Gas Mixture: ArF, KrF
Wavelength: 193 nm, 248 nm
Pulse Energy: 100 mJ
Average Power: 5 W
Max Repetition Rate: 50 Hz
Data Sheet
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