IXION-193-SLM DPSS Laser
Description
The IXION-193 is a single frequency all-solid-state laser system for applications such as optical metrology, calibration of 193 nm stepper optics or bandwidth control of high power ArF excimer lasers. The spectral bandwidth is near its theoretical Fourier limit. The center wavelength of the system can be chosen at time of order between 190 and 194 nm with an accuracy of 0.01 nm. As an option a high precision spectrometer with an absolute spectral accuracy of 0.001 nm is integrated into the system. This allows maximum control of the spectral tuning of the laser.
IXION-193-SLM DPSS Laser
Specifications |
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|---|---|
| Avg. Power: | 0.01 W |
| Wavelength: | 193.368 nm |
| Repetition Rate: | 6-6kHz |
| Spatial Mode (M^2): | 1.6 |
| Pulse Duration: | 10 ns |
| Pulse-to-Pulse Stability (RMS): | N/A % |
| Cooling: | N/A |
Features
- Diode laser pumped
- Industrial proved frequency conversion
- Sealed housing
- Slot mounted laser diode
- Excellent TEM beam profile 00
- Low pulse-to-pulse fluctuation (s <3%)
- Maintenance-free thermo-electrical heat management
- 19”-rack power supply and chiller LabVIEW drivers Integrated Spectrometer for online wavelength control (optional)
Applications
- 193 nm metrology
- Spectrometer calibration
- Interferometry
- Injection seeding of Excimer lasers
For pricing, technical or any other questions please contact the supplier
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- No markups, no fees
- Direct contact with supplier
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Frequently Asked Questions
The IXION-193-SLM DPSS Laser is used for applications such as optical metrology, calibration of 193 nm stepper optics or bandwidth control of high power ArF excimer lasers.
The center wavelength of the system can be chosen at time of order between 190 and 194 nm with an accuracy of 0.01 nm.
The spectral bandwidth is near its theoretical Fourier limit.
The weight of the IXION-193-SLM DPSS Laser is 74 kg.
The IXION-193-SLM DPSS Laser is a Class 4 laser (IEC-825).