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Page 4 - Energy Sensors

Model 458 UV High Intensity & Energy Meters For Wafer Steppers
OAI
The microprocessor based Model 458 UV Light Intensity & Energy System accurately profiles exposure energy (dose) to assess the performance of the stepper. It is designed for use with the ASML High Intensity, Canon, Nikon, and Ultratech High Intensity Wafer Steppers. Reads intensity, energy, and time (4000 mW/cm², 999.9 mJ/cm²) ...

Specifications

Max Measurable Energy: 9999 mJ
Max Repetition Rate: -- Hz
Effective Aperture: -- mm
Spectral Range: 0.365-0.436um
Model 457 UV Intensity & Energy Meter
OAI
Designed for use with ASML, Canon, Nikon and GCA & Rudolph Technology Wafer Steppers the Model 457 UV Light Intensity & Energy System accurately profiles exposure energy (dose) to assess the performance of the stepper. It reads intensity, energy, and time (16-1600 mW/cm², 999.9 mJ/cm²) for 400 and 420 nm wavelengths. Optional ...

Specifications

Max Measurable Energy: 9999 mJ
Max Repetition Rate: -- Hz
Effective Aperture: -- mm
Spectral Range: 0.365-0.436um