Model 358 UV Light & Intensity Energy Meters For High Intensity Steppers
Description
This instrument is designed for use with the ASML High Intensity, Canon, Nikon, and Ultratech High Intensity Wafer Steppers. The microprocessor based Model 358 UV Light Intensity & Energy Meter performs measurement, storage and recall of nine series of readings. Reads intensity, energy, and time (4000 mW/cm², 999.9 mJ/cm²) for 365, 400, 420, and 436 nm wavelengths.
Model 358 UV Light & Intensity Energy Meters For High Intensity Steppers
Specifications |
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|---|---|
| Max Average Power: | 4 W |
| Effective Aperture: | -- mm |
| Spectral Range: | 0.356-0.436um |
| Cooling Method: | No cooling |
Features
Digital Display provides clear measurements traceable to NIST
Measures Intensity, Time, and Energy
Records % deviation over a series of exposures
Probe wavelength display helps prevent errors in setup
Simple push button operation provides reliable results
Detachable probes to match the spectral response of many photoresists
Display readings can be frozen
Front panel reminders prompt the user
Rugged aluminum case features handle and probe pouch for portability
Applications
For pricing, technical or any other questions please contact the supplier
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United States
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Frequently Asked Questions
The Model 358 UV Light & Intensity Energy Meter features a digital display that provides clear measurements traceable to NIST, measures intensity, time, and energy, records % deviation over a series of exposures, has detachable probes to match the spectral response of many photoresists, and has front panel reminders that prompt the user.
The accuracy of the Model 358 UV Light & Intensity Energy Meter is ± 3.0 (WB) and ± 1.5 (NB).
The Model 358 UV Light & Intensity Energy Meter is designed for use with the ASML High Intensity, Canon, Nikon, and Ultratech High Intensity Wafer Steppers.
The power source for the Model 358 UV Light & Intensity Energy Meter is 110/220 VAC, 50/60 Hz, Rechargeable 6v Battery (with automatic shut off).
The Model 358 UV Light & Intensity Energy Meter can perform measurement, storage and recall of nine series of readings. It reads intensity, energy, and time (4000 mW/cm², 999.9 mJ/cm²) for 365, 400, 420, and 436 nm wavelengths.