SD15/30.x.C Uniaxial Piezoelectric High-Speed Scanning Motion Linear Stage
Description
The SD15/30.x.C is a compact and high-performance piezoelectric motion unit designed for room temperature (RT) applications.
The piezo-linear stage features a closed-loop control system and supports resistance type position sensing. With its ultra-quiet motion and 20 kHz drive frequency, it provides smooth and accurate movement. The SD15/30.x.C is available in different versions, including non-magnetic, high vacuum, and ultra-high vacuum options, catering to various application requirements.
SD15/30.x.C Uniaxial Piezoelectric High-Speed Scanning Motion Linear Stage
Specifications |
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|---|---|
| Axes Of Motion: | One |
| Travel Range: | 0.015-0.030 mm |
| Load Capacity (Horizontal): | -- kg |
| Load Capacity (Vertical): | -- kg |
| Max Speed: | -- mm/s |
| Weight: | 0.25-0.35 kg |
| Guiding Mechanism: | Other |
| Voltage Requirement: | Other |
| Resolution: | 0.1/0.2 nm |
| Repeatability: | 2/4 nm |
| Linearity Error: | 0.035 % |
| Yaw: | 2 urad |
| Pitch: | 2 urad |
Features
- Travel range in X: 15 um, 30 um
- Size: 62 mm × 40 mm× 13.5 mm, 80 mm × 40 mm× 13.5 mm
- Close loop resolution < 0.1nm;
- Capacitive sensor
- High dynamic
- Support Options: high vacuum (.HV）& ultra- high vacuum (.UHV）
Applications
- Precision positioning
- Microscopy
- Optics and photonics research
- Semiconductor manufacturing
- Life science applications
- Metrology and inspection systems
- Work in a glove box
For pricing, technical or any other questions please contact the supplier
- No registration required
- No markups, no fees
- Direct contact with supplier
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How to order?
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Ships from:
China
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Sold by:
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On FindLight:
since 2020