NPS-Z-15L Ultra High Load Closed Loop 15 Micron Actuator
Description
The NPS-Z-15L is a piezo-scanned stage optimized for high load applications. The NPS-Z-15L offers over 15μm of closed loop travel, with sub- nanometre resolution and stability. This stage has been specifically designed for high stiffness, which allows loads of up to 500 Kg to be carried. Optimized mechanical design has yielded a device with an unloaded resonant frequency of greater than 8000Hz. Super Invar construction means the stage has very high thermal and environmental stability. Dynamic optimization via closed loop PID electronics maximise in-situ stepping response and position stability of the system. Electronic configurations can offer independent control of up to 3 or up to 6 stages, ideal for alignment/levelling of large optic or wafer/mask devices.
NPS-Z-15L Ultra High Load Closed Loop 15 Micron Actuator
Specifications |
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|---|---|
| Microstep Size (default Resolution): | 1 um |
| Built-in Controller: | Yes |
| Travel Range: | 0.016 mm |
| Accuracy (unidirectional): | -- um |
| Backlash: | Not Specified |
| Maximum Speed: | -- mm/s |
| Minimum Speed: | -- mm/s |
| Axes Of Motion: | Three |
Features
>15μm travel with sub-nanometer resolution
Typically <0.002% hysteresis and <0.01% linearity error
<!--0-->First resonant frequency >8 KHz
500 Kg maximum load
Robust and reliable
Super Invar construction
Applications
Semiconductor wafer/mask positioning systems
Large optical position systems
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United States
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Frequently Asked Questions
The NPS-Z-15L actuator is typically used in semiconductor wafer/mask positioning systems and large optical position systems.
Electronic configurations can offer independent control of up to 3 or up to 6 stages, ideal for alignment/levelling of large optic or wafer/mask devices.
The NPS-Z-15L actuator can carry loads of up to 500 Kg.
The NPS-Z-15L actuator has sub-nanometer resolution.
The NPS-Z-15L actuator offers over 15μm of closed loop travel.