N 2/5 Piezo Multi Layer Ceramic Actuator Without Housing
Description
PZT multilayer stack type actuators are made for industrial applications. They are specially shielded by a flexible insulation material which guarantees the highest possible dynamic performance under the toughest requirements. Based on their design, they are well suited for easy integration into specific customer systems. The flexible polymer coating material gives the PZT actuators proven protection against various and harsh environments. The advantage of a flexible insulation versus brittle ceramic insulation is a longer lifetime. These PZT multilayer stack type actuators have been successfully working for more than 15 years in a vast number of applications in the fields of nano-metrology, semiconductor, material sciences and scanning applications.
N 2/5 Piezo Multi Layer Ceramic Actuator Without Housing
Specifications |
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|---|---|
| Motion Distance: | 2 um |
| Resolution: | 0.004 nm |
Features
Motion up to 123 µm
Sub-nm resolution
High stiffness up to 250 N/µm
Blocking force up to 3500 N
Various top/end plates
Applications
positioning application demanding high accuracy under high load environment conditions
long lifetime
permanent movement in industrial applications
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Germany
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Frequently Asked Questions
PZT multilayer stack type actuators are made for industrial applications, such as nano-metrology, semiconductor, material sciences, and scanning applications.
PZT multilayer stack type actuators are used in positioning applications demanding high accuracy under high load environment conditions, long lifetime, and permanent movement in industrial applications.
The advantage of the flexible insulation material versus brittle ceramic insulation is a longer lifetime.
The blocking force of PZT multilayer stack type actuators is up to 3500 N.
The motion range of PZT multilayer stack type actuators is up to 123 µm.