<0.005 waves Interferometers

Heliotis AG

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The heliInspetTM H6 has been engineered to meet the specifications of the most demanding 3D in-line inspec-tion tasks such as measuringstep heights, angles, shape, roughness, ripple, waviness, defects, scratches, wear off flatness, coplanarity, deformations film thickness (tomographic mode)Benefitting from Heliotis’ long experience ...

Specifications
Interferometer Configuration:	Twyman–Green Interferometer
Light Source:	White Light
Output Polarization:	Not Specified
RMS Repeatability:	<0.01 waves
RMS Precision:	<0.005 waves

Data Sheet

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Optical Metrology

<0.005 waves Interferometers

Specifications