heliOptics WLI6
Description
The heliInspetTM H6 has been engineered to meet the specifications of the most demanding 3D in-line inspec-tion tasks such as measuring
step heights, angles, shape, roughness, ripple, waviness, defects, scratches, wear off flatness, coplanarity, deformations film thickness (tomographic mode)
Benefitting from Heliotis’ long experience with 3D sensors for industrial applications, the H6 combines interferometric precision with robustness and high throughput.
heliOptics WLI6
Specifications |
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|---|---|
| Interferometer Configuration: | Twyman–Green Interferometer |
| Light Source: | White Light |
| Output Polarization: | Not Specified |
| RMS Repeatability: | <0.01 waves |
| RMS Precision: | <0.005 waves |
Features
topology measurement with reliable sub-micrometer resolution on smooth surfaces
based on the 3D pixel sensor heliSens™ S3
unsurpassed measurement speed and resolution
robust measurements thanks to high dynamic range
magnifications from 2x to 100x
Applications
3D geometry such as step heights, angles, radii
roughness measurement according to EN ISO 25178
flatness and coplanarity
thickness of transparent layers
For pricing, technical or any other questions please contact the supplier
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- No markups, no fees
- Direct contact with supplier
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How to order?
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Ships from:
Switzerland
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Sold by:
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On FindLight:
External Vendor
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Frequently Asked Questions
The heliInspetTM H6 is suitable for 3D geometry measurement such as step heights, angles, radii, roughness measurement according to EN ISO 25178, flatness and coplanarity, and thickness of transparent layers.
The heliInspetTM H6 combines interferometric precision with robustness and high throughput. It has unsurpassed measurement speed and resolution, and can provide reliable sub-micrometer resolution on smooth surfaces. It also has a high dynamic range for robust measurements.
The heliInspetTM H6 has a measurement head that is compatible with exchangeable heliOptics™ WLI6 interferometer modules. It has a custom high-speed CMOS sensor with in-pixel signal processing, and an integrated high power LED (standard) or SLED (optional) light source. Its dimensions are 147 mm x 75 mm x 45 mm, and it weighs 800 g (excluding WLI6).
The heliInspetTM H6 is used for demanding 3D in-line inspection tasks such as measuring step heights, angles, shape, roughness, ripple, waviness, defects, scratches, wear off flatness, coplanarity, deformations, and film thickness.
Software development kits (SDK) are available for Halcon, LabView, C++, and Python.