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Scatterometers

Conoscopic Scatterometer
Eckhardt Optics LLC
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Conoscopic Scatterometer
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Eckhardt Optics designs and manufactures a line of scatterometers based on our conoscopes. To turn a conoscope into a scatterometer, we add light sources for transmissive measurements (BTDF) or reflective measurements (BRDF) and appropriate analysis software. These scatterometers can be customized to match your measurement requirements.

Specifications
Wavelength: 405-650nm
Resolution: 0.13 degrees
Accuracy: 5 %
Dynamic Range: 8-10bits
Data Sheet
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Frequently Asked Questions

A scatterometer is a non-destructive metrology technique that uses light scattering to measure the properties of surfaces and thin films.

Scatterometry is a non-destructive, fast, and highly accurate metrology technique. It can measure the dimensions of features that are too small to be resolved by optical microscopy, making it a valuable tool for the semiconductor industry. Scatterometry can also measure the thickness and refractive index of thin films, making it useful in the production of flat panel displays and solar cells.

Scatterometry is commonly used in the semiconductor industry to measure the dimensions and shape of features on semiconductor wafers, such as line widths and critical dimensions. It can also be used to measure the thickness and refractive index of thin films, making it useful in the production of flat panel displays and solar cells.

Scatterometry works by directing a beam of light onto the surface of a sample and measuring the intensity and angle of the scattered light. The computer then processes this data to determine the properties of the surface or thin film being measured.

Scatterometry is a highly accurate metrology technique, with sub-nanometer accuracy for some applications. The accuracy of scatterometry measurements depends on factors such as the quality of the data collected and the complexity of the model used to analyze the data.

Scatterometry has some limitations, such as its inability to measure subsurface features and its sensitivity to sample roughness and contaminants. Scatterometry also requires the use of complex models to analyze the data, which can be time-consuming and require significant computational resources.

There are 1 different Scatterometers from suppliers and manufacturers listed in this category. In just a few clicks you can compare different Scatterometers with each other and get an accurate quote based on your needs and specifications. Please note that the prices of Scatterometers vary significantly for different products based on various factors including technical parameters, features, brand name, etc. Please contact suppliers directly to inquire about the details and accurate pricing information for any product model. Simply navigate to the product page of interest and use the orange button to directly reach out to the respective supplier with one click.

Did You know?

Did you know that Scatterometers are non-destructive metrology tools that use light scattering to measure the properties of surfaces and thin films? Scatterometry is a fast and highly accurate technique that can measure the dimensions of features that are too small to be resolved by optical microscopy, making it a valuable tool for the semiconductor industry. Scatterometry can also measure the thickness and refractive index of thin films, making it useful in the production of flat panel displays and solar cells. However, scatterometry has some limitations, such as its inability to measure subsurface features and its sensitivity to sample roughness and contaminants. Overall, scatterometers are a powerful tool for measuring the properties of surfaces and thin films in a non-destructive and highly accurate manner, making them invaluable in industries such as semiconductor manufacturing and materials science.
External links:
1 - Interesting facts about scatterometry