LITHOSCALE Maskless Exposure Lithography System
Description
The LITHOSCALE system featuring EV Group’s MLE™ maskless exposure technology tackles legacy bottlenecks by combining powerful digital processing that enables realtime data transfer and immediate exposure, high structuring resolution and throughput scalability. Its mask-free approach eliminates mask-related consumables, while the exposure system with its tunable solid-state laser source is designed for high redundancy and long life-time stability with unique auto-calibration capabilities that eliminate maintenance. Powerful real-time digital processing enables immediate exposure from the design-file to the substrate – thereby avoiding hours of conversion time for each digital mask layout. LITHOSCALE features high-resolution (< 2 µm L/S), dynamically die-level addressable exposure of the entire substrate surface, which enables agile consumablefree processing and low cost of ownership (CoO). The LITHOSCALE system integrates full-wafer top-and-backside alignment utilizing dedicated objectives with visible to nearIR capability and proprietary chuck designs accommodating wafer sizes up to 300 mm. The system features dynamic alignment modes with an automatic focus, in order to adapt to the substrate material and surface variations. The ability to finely control focus level position keeps sidewalls steep as well as desired 3D contour of the resist, while preventing edge topping and footing. Large working distance and automatic adaptive focus ensures patterning uniformity across the exposure surface. It also offers individualized die processing, while fast full-field positioning and dynamic alignment enable high scalability for a range of substrate sizes and shapes.
LITHOSCALE Maskless Exposure Lithography System
Specifications |
|
|---|---|
| Printing Technology: | Grayscale Lithography |
| Min XY Feature Size: | 1000 nm |
| Min Vertical Step: | -- nm |
| Min Surface Roughness: | -- nm |
| Area Printing Speed: | -- mm^2/h |
For pricing, technical or any other questions please contact the supplier
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Ships from:
Austria
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Sold by:
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On FindLight:
External Vendor
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