ZERODUR Glass Ceramic
Description
ZERODUR® is a glass ceramic with an extremely low thermal expansion coefficient. The most important properties of ZERODUR® are:
- Nearly zero thermal expansion with outstanding 3D homogeneity
- High internal quality
- Good processing behavior
- Can be polished to a very high accuracy
- Can be coated easily
- Low Helium permeability
- Non-porous
- Good chemical stability
ZERODUR Glass Ceramic
Specifications |
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|---|---|
| Application Spectrum: | Deep Ultraviolet (DUV), Ultraviolet (UV), Visible (VIS), Infrared (IR), Near Infrared (NIR), Short Wavelength IR (SWIR), Long Wavelength IR (LWIR), Broadband |
| Wavelength Range: | 1-1 nm |
Applications
- Astronomy: For more than 30 years, ZERODUR® has been the favored material for mirror substrates of earthbound and orbital telescopes. ZERODUR® can be made in large batches with reproducible quality and is therefore suited for future extremely large telescopes (ELTs) in the 20 m to 100 m class.
- Modern fabrication technologies enable the production of structures with more than 65% weight reduction. ZERODUR® is the ideal mandrel material for the shaping of mirror shells in future x-ray telescope projects due to the excellent homogeneity of its coefficient of thermal expansion.
- Lithography: ZERODUR® is used as a movable mechanical part in wafer stepper and scanner machines, to achieve precise and reproducible wafer positioning. ZERODUR® is an ideal substrate material for reflective optics in the forthcoming EUV lithography due to its almost zero thermal expansion, outstanding homogeneity and good processing behavior.
- Measurement Technology: The extremely low thermal expansion and proven long-term dimensional stability of ZERODUR® make it an ideal reference standard for measurement instruments.
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Frequently Asked Questions
ZERODUR® is a glass ceramic with an extremely low thermal expansion coefficient.
The important properties of ZERODUR® are nearly zero thermal expansion with outstanding 3D homogeneity, high internal quality, good processing behavior, and the ability to be polished to a very high accuracy.
ZERODUR® is commonly used in astronomy for mirror substrates of telescopes, in lithography for wafer positioning, and in measurement technology as a reference standard for measurement instruments.
ZERODUR® can be supplied in the form of discs, rectangular blocks, prisms, rods, and cut pieces measuring from a few cm up to approximately 4m in length.
Yes, ZERODUR® can be coated easily.