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Frequently Asked Questions

The price includes source with single filament, power supply, feedthroughs, one mass flow controller, and cables for installation.

The maximum beam current of the Mini UHV Ion Beam Source Model 750 is 1.5 amps in oxygen, nitrogen or argon (500W maximum).

The Mini UHV Ion Beam Source Model 750 provides ion energies up to 225eV, with beam currents available up to 4 Amps (to a maximum of 750W).

Pulsed Mode for ion assisted fluorides provides fully compacted, damage free results not achievable with any other ion source.

The Telemark ion beam source line is capable of either mixed gas or pure oxygen operation, allowing for deposition of metal oxide films of the highest index and lowest stress.

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