EQ-10HR High Repetition Rate EUV Light Source
Description
The EQ-10HR is a compact, easy-to-use, reliable, and cost-effective EUV light source based on Energetiq’s proven Electrodeless Z-Pinch™ technology using Xenon gas. The EQ-10HR high repetition rate EUV source is uniquely suited for metrology and research applications where simulation of high volume manufacturing (HVM) is required. The Energetiq EQ-10HR EUV source is a stand-alone system, ready to be integrated into a process tool. It includes the electrodeless Z-pinch source assembly, maglev vacuum pumping subsystem, gas delivery subsystem, power delivery subsystem, and control electronics.
EQ-10HR High Repetition Rate EUV Light Source
Specifications |
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|---|---|
| Central Wavelength: | 13.5 nm |
| Spectral Bandwidth: | 0.27 nm |
| EUV Output Power (2pi Steradian): | 20 W |
| Pulse Repetition Rate: | 1000-10000Hz |
Features
Performance
- 10 kHz pulse rate
- Small plasma size
- Low debris
Low Cost of Ownership
- Low Xenon flow rate
- Minimized consumable cost
- Small footprint
Proven Reliability
- Patented Electrodeless Z-Pinch™ technology
- CE Mark and SEMI S2-0703 compliant
Applications
Accelerated EUV Optics Testing
EUV Metrology
EUV Resist Development
Defect Inspection
EUV Microscopy
For pricing, technical or any other questions please contact the supplier
- No registration required
- No markups, no fees
- Direct contact with supplier
Contact Supplier
How to order?
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Ships from:
United States
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Sold by:
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On FindLight:
since 2017
Frequently Asked Questions
The EQ-10HR is a compact, easy-to-use, reliable, and cost-effective EUV light source based on Energetiq’s proven Electrodeless Z-Pinch™ technology using Xenon gas.
The EQ-10HR EUV source has a pulse repetition rate of 10 kHz.
The EQ-10HR EUV source is uniquely suited for metrology and research applications where simulation of high volume manufacturing (HVM) is required. It can be used for accelerated EUV optics testing, EUV metrology, EUV resist development, defect inspection, and EUV microscopy.
The EQ-10HR system has a source rack dimension of 2002 x 611 x 915 mm (78.8 x 24.1 x 36.0 in) and a weight of 440 kg (968 lbs). The instrument rack dimension is 1356 x 611 x 915 mm (53.4 x 24.1 x 36.0 in) and a weight of 215.5 kg (475 lbs). The modulator dimension is 498 x 356 x 701 mm (19.6 x 14.0 x 27.6 in) and a weight of 54.4 kg (120 lbs). The source dimension is 810 x 697 x 769 mm (31.9 x 27.5 x 30.3 in) and a weight of 98.4 kg (217 lbs). The fore pump assembly dimension is 643 x 259 x 460 mm (30.1 x 21.9 x 21.0 in) and a weight of 27.7 kg (61 lbs).
The EQ-10HR system requires electrical power of 208V, 3Ø, 50/60 Hz, 30A, cooling water of 40-60 PSID (0.28–0.41 MPa), 1.5 GPM (5.7 lpm) min., 30°C max. inlet, clean dry air of 80–100 PSIG (0.55–0.69 MPa), and Xenon of 15–40 PSIG (0.10–0.28 MPa), 100 sccm max. (40 sccm typ.). It is compliant with the EQ-10 Series CE Mark and SEMI S2-0703.