ISE ELLIPSOMETER
Description
The iSE is a new in-situ spectroscopic ellipsometer developed for real-time monitoring of thin film processing. Using our proven technology, the iSE enables users to optimize optical properties of deposited films, control film growth with sub-angstrom sensitivity, and monitor growth kinetics. The iSE utilizes a new optical design with Dual-RotationTM in combination with modern CCD detection to provide hundreds of wavelengths in a fraction of a second. Dual-Rotation enables continuous, multi-zone measurements with unparalleled accuracy and capability
ISE ELLIPSOMETER
Specifications |
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| Spectral Range: | 400-1000nm |
| Spectral Resolution: | 190 nm |
| Angle Of Incidence: | 60-75deg |
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United States
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Frequently Asked Questions
The iSE ellipsometer is used for real-time monitoring of thin film processing and optimizing optical properties of deposited films.
The iSE can accurately determine thickness and optical properties for a wide variety of thin films including metals, semiconductors, oxides, nitrides, and more.
The iSE utilizes a new optical design with Dual-RotationTM and modern CCD detection to provide hundreds of wavelengths in a fraction of a second, enabling fast and wide-spectrum measurements.
Yes, the iSE ellipsometer uses light to probe the thin film in a noninvasive manner, allowing measurements to be taken without any damage or special sample preparation.
The iSE ellipsometer provides higher certainty in measuring thickness and optical properties compared to other techniques, thanks to its powerful spectroscopic ellipsometry capabilities.