M-2000V ELLIPSOMETER
Description
The M-2000® line of spectroscopic ellipsometers is engineered to meet the diverse demands of thin film characterization. An advanced optical design, wide spectral range, and fast data acquisition combine in an extremely powerful and versatile tool. The M-2000 delivers both speed and accuracy. Our patented RCE technology combines Rotating Compensator Ellipsometry with high-speed CCD detection to collect the entire spectrum (hundreds of wavelengths) in a fraction of a second with a wide array of configurations. The M-2000 is the first ellipsometer to truly excel at everything from in-situ monitoring and process control to large-area uniformity mapping and general purpose thin film characterization. No other ellipsometer technology acquires a full spectrum faster.
M-2000V ELLIPSOMETER
Specifications |
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| Spectral Range: | 370-1000nm |
| Spectral Resolution: | 390 nm |
| Angle Of Incidence: | 45-90deg |
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Frequently Asked Questions
The M-2000V Ellipsometer is used for thin film characterization, including measuring thin film thickness and optical constants.
The M-2000V utilizes patented RCE (rotating compensator ellipsometer) technology, which allows for high accuracy and precision in measurements.
The M-2000V can collect over 700 wavelengths, ranging from ultraviolet to near infrared, all simultaneously.
Yes, the M-2000V has a flexible system integration and can be directly attached to a process chamber or configured on a table-top base.
The M-2000V can measure the optical constants (both n and k) of any type of material, including dielectric, organic, semiconductor, or metal.